Topics in Growth and Device Processing of III-V Semiconductors Stephen Pearton

ISBN: 9781299662988

Published: May 10th 2014

ebook

565 pages


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Topics in Growth and Device Processing of III-V Semiconductors  by  Stephen Pearton

Topics in Growth and Device Processing of III-V Semiconductors by Stephen Pearton
May 10th 2014 | ebook | PDF, EPUB, FB2, DjVu, AUDIO, mp3, RTF | 565 pages | ISBN: 9781299662988 | 6.70 Mb

This book describes advanced epitaxial growth and self-aligned processing techniques for the fabrication of III-V semiconductor devices such as heterojunction bipolar transistors and high electron mobility transistors. It is the first book toMoreThis book describes advanced epitaxial growth and self-aligned processing techniques for the fabrication of III-V semiconductor devices such as heterojunction bipolar transistors and high electron mobility transistors. It is the first book to describe the use of carbon-doping and low damage dry etching techniques that have proved indispensable in making reliable, high performance devices.

These devices are used in many applications such as cordless telephones and high speed lightwave communication systems.Contents: Compound Semiconductor Growth by Metalorganic Molecular Beam Epitaxy (MOMBE)Growth of Heterojunction Bipolar Transistors from Molecular BeamsHeteroepitaxyImplant Doping and IsolationRapid Thermal AnnealingWet and Dry Etching of III-V SemiconductorsHydrogen in Crystalline Semiconductors: III-V CompoundsHeterojunction Bipolar Transistors: Processing and DevicesNovel Heterostructure Field Effect TransistorsReadership: Engineers and condensed matter physicists.



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